Das EVOCHEM Sortiment enthält eine breite Palette an Oxiden, die für die spezielle Anforderungen der Hochvakuum Beschichtung (PVD) optimiert wurden. Dabei liefert EVOCHEM Metalloxide in vollständig stöchiometrischer Form (weiss, luftkalziniert), geringfügig unterstoichiometrisch (grau, vakuumkalziniert) und in einige stark unterstoichiometrische Formen.
Neben allen gängigen Oxiden (Ta2O5, Ti2O3, Ti3O5) liefert EVOCHEM auch eine Reihe an Spezialoxiden (LaTiO3), die sich durch eine hohe Prozessstabilität sowie eine höhere Ausbeute auszeichnen.
| Name | Formel | Reinheit |
|---|---|---|
| Aluminum Oxide | Al2O3 | 2N-6N |
| Antimony Oxide | Sb2O3 | 2N3-3N |
| Antimony Tin Oxide | ATO | 3N5 |
| Barium Titanate | BaTiO3 | 2N6-4N |
| Bismuth Oxide | Bi2O3 | 2N5-3N |
| Cerium Oxide | CeO2 | CeO2/TREO:2N-3N min; TREO:2N min |
| Copper Oxide | CuO | 3N |
| Chromium Oxide | Cr2O3 | 3N |
| Dysprosium Oxide | Dy2O3 | Dy2O3/TREO:2N-3N min; TREO:2N min |
| Erbium Oxide | Er2O3 | ErO3/TREO:2N-3N min; TREO:2N min |
| Europium Oxide | Eu2O3 | Eu2O3/TREO:2N-3N min; TREO:2N min |
| Gadolinium Oxide | Gd2O3 | Gd2O3/TREO:2N-3N min; TREO:2N min |
| Gallium Oxide | Ga2O3 | 4N-5N |
| Germanium Oxide | GeO2 | 4N-5N |
| Hafnium Oxide | HfO2 | 4N |
| Holmium Oxide | Ho2O3 | Ho2O3/TREO:2N-3N min; TREO:2N min |
| Indium Oxide | In2O3 | 2N-5N |
| Indium Tin Oxide | ITO | 4N |
| Iron Oxide | Fe2O3 | 3N |
| Iron Oxide | Fe3O4 | 3N |
| Lanthanum Oxide | La2O3 | La2O3/TREO:2N-3N min; TREO:2N min |
| Lanthanum Aluminate | LaAlO3 | 3N |
| Lead Titanate | PbTiO3 | 3N |
| Lead Zirconate | PbZrO3 | 4N |
| Lithium Niobate | LiNbO3 | 4N |
| Lithium Oxide | LiO | 3N |
| Lithium Tantalate | LiTaO3 | 4N |
| Lutetium Iron Oxide | Lu3Fe5O12 | 3N |
| Lutetium Oxide | Lu2O3 | Lu2O3/TREO:2N-3N min; TREO:2N min |
| Magnesium Oxide | MgO | 2N5-4N |
| Manganese Oxide | MnO | 3N |
| Magnesium Titanate | MgTiO3 | 3N |
| Molybdenum Oxide | MoO3 | 2N8-3N |
| Neodymium Oxide | Nd2O3 | Nd2O3/TREO:2N-3N min; TREO:2N min |
| Niobium Pentoxide | Nb2O5 | 3N-4N |
| Praseodymium Oxide | Pr6O11 | Pr6O11/TREO:2N-3N min; TREO:2N min |
| Praseodymium Titanate | PrTiO22 | 3N |
| Praseodymium Oxide | Pr2O3 | Pr2O3/TREO:2N-3N min; TREO:2N min |
| Samarium Oxide | Sm2O3 | Sm2O3/TREO:2N-3N min; TREO:2N min |
| Scandium Oxide | Sc2O3 | Sc2O3/TREO: 4N-5N TREO: 2N5-3N5 |
| Silicon Dioxide | SiO2 | 4N |
| Silicon Monoxide | SiO | 3N-4N |
| Strontium Titanate | SrTiO3 | 3N |
| Strontium Zirconate | SrZrO3 | 3N |
| Tantalum Pentoxide | Ta2O5 | 3N5-4N |
| Terbium Oxide | Tb4O7 | Tb4O7/TREO:2N5-5N; TREO:2N |
| Tellurium Oxide | TeO2 | 4N-5N |
| Thulium Oxide | Tm2O3 | Tm2O3/TREO: 4N-5N TREO: 2N5-3N5 |
| Titanium Dioxide | TiO2 | 3N |
| Titanium Monoxide | TiO | 3N |
| Titanium Pentoxide | Ti3O5 | 3N5-4N |
| Titanium Trioxide | Ti2O3 | 3N5 |
| Tin Dioxide | SnO2 | 3N-6N |
| Tin Monoxide | SnO | 3N-6N |
| Tungsten oxide | WO3 | 3N |
| Vanadium Pentoxide | V2O5 | 3N |
| Yttrium Aluminum Oxide (YAG) | Y3Al5O12 | 4N |
| Ytterbium Oxide | Yb2O3 | Yb2O3/TREO: 2N-4N; TREO: 2N min |
| Yttrium Oxide | Y2O3 | Re/TREO: 4N-5N TREO: 2N5-3N5 |
| Zinc Oxide | ZnO | 3N |
| Zinc Aluminum Oxide | ZnO:Al | 3N |
| Zirconium Oxide | ZrO2 | 3N-4N |
| Zirconia (Y-Stab) | Zr | 3N-4N |
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